In Situ Thermal Atomic Layer Etching for Sub-5 nm InGaAs Multigate MOSFETs Journal Article uri icon

Overview

publication date

  • August 1, 2019

Full Author List

  • Lu W; Lee Y; Gertsch JC; Murdzek JA; Cavanagh AS; Kong L; del Alamo JA; George SM

Other Profiles

Additional Document Info

start page

  • 5159

end page

  • 5166

volume

  • 19

issue

  • 8