Analysis of Al2O3 atomic layer deposition on ZrO2 nanoparticles in a rotary reactor
Journal Article
Overview
publication date
- September 1, 2007
has restriction
- closed
Date in CU Experts
- September 6, 2013 12:05 PM
Full Author List
- McCormick JA; Rice KP; Paul DF; Weimer AW; George SM
author count
- 5
citation count
- 56
published in
- Chemical Vapor Deposition Journal
Other Profiles
International Standard Serial Number (ISSN)
- 0948-1907
Digital Object Identifier (DOI)
Additional Document Info
start page
- 491
end page
- 498
volume
- 13
issue
- 9