Tungsten atomic layer deposition on polymers Journal Article uri icon

Overview

publication date

  • July 31, 2008

Full Author List

  • Wilson CA; McCormick JA; Cavanagh AS; Goldstein DN; Weimer AW; George SM

Other Profiles

Additional Document Info

start page

  • 6175

end page

  • 6185

volume

  • 516

issue

  • 18