Modeling of silicon deposition process scale-up employing axisymmetric ring nozzle sources. I Journal Article uri icon

Overview

publication date

  • May 1, 1999

has restriction

  • closed

Date in CU Experts

  • August 13, 2019 12:53 PM

Full Author List

  • Chen G; Boyd ID

author count

  • 2

citation count

  • 3

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Additional Document Info

start page

  • 970

end page

  • 977

volume

  • 17

issue

  • 3