Atomic Layer Deposition of Tantalum Nitride Using A Novel Precursor
Journal Article
Overview
publication date
- June 16, 2011
Full Author List
- Somani S; Mukhopadhyay A; Musgrave C
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 11507
end page
- 11513
volume
- 115
issue
- 23