Atomic Layer Deposition of Tantalum Nitride Using A Novel Precursor Journal Article

Overview

CU Boulder Authors

• Musgrave, Charles Bruce

publication date

• June 16, 2011

Full Author List

• Somani S; Mukhopadhyay A; Musgrave C

published in

• Journal of Physical Chemistry C  Journal

Other Profiles

Digital Object Identifier (DOI)

• 10.1021/jp1059374

Additional Document Info

start page

• 11507

end page

• 11513

volume

• 115

issue

• 23