Atomic Layer Deposition of Tantalum Nitride Using A Novel Precursor Journal Article uri icon

Overview

publication date

  • June 16, 2011

Full Author List

  • Somani S; Mukhopadhyay A; Musgrave C

Other Profiles

Additional Document Info

start page

  • 11507

end page

  • 11513

volume

  • 115

issue

  • 23