Atomic Layer Deposition of Tantalum Nitride Using A Novel Precursor Journal Article uri icon

Overview

publication date

  • June 16, 2011

Date in CU Experts

  • September 6, 2013 12:08 PM

Full Author List

  • Somani S; Mukhopadhyay A; Musgrave C

author count

  • 3

citation count

  • 20

Other Profiles

International Standard Serial Number (ISSN)

  • 1932-7447

Additional Document Info

start page

  • 11507

end page

  • 11513

volume

  • 115

issue

  • 23