Atomic Layer Deposition of Tantalum Nitride Using A Novel Precursor Journal Article

Overview

CU Boulder Authors

• Musgrave, Charles Bruce

publication date

• June 16, 2011

Date in CU Experts

• September 6, 2013 12:08 PM

Full Author List

• Somani S; Mukhopadhyay A; Musgrave C

author count

• 3

citation count

• 20

published in

• The Journal of Physical Chemistry C: Energy Conversion and Storage, Optical and Electronic Devices, Interfaces, Nanomaterials, and Hard Matter  Journal

Other Profiles

International Standard Serial Number (ISSN)

• 1932-7447

Digital Object Identifier (DOI)

• 10.1021/jp1059374

Additional Document Info

start page

• 11507

end page

• 11513

volume

• 115

issue

• 23