EFFECT OF ATOMIC LAYER ETCHING ON RESIDUAL STRESS OF AL(2)O(3) ALD ULTRA-THIN FILM SUSPENDED STRUCTURES
Conference Proceeding
Overview
publication date
- June 23, 2019
Date in CU Experts
- January 14, 2020 1:12 AM
Full Author List
- Sortino E; Houlton JP; Gertsch JC; Supekar OD; Skidmore GD; George SM; Rogers CT; Bright VM
author count
- 8
citation count
- 2
presented at event
Additional Document Info
start page
- 2404
end page
- 2407