EFFECT OF ATOMIC LAYER ETCHING ON RESIDUAL STRESS OF AL(2)O(3) ALD ULTRA-THIN FILM SUSPENDED STRUCTURES Conference Proceeding uri icon

Overview

publication date

  • June 23, 2019

Full Author List

  • Sortino E; Houlton JP; Gertsch JC; Supekar OD; Skidmore GD; George SM; Rogers CT; Bright VM

Additional Document Info

start page

  • 2404

end page

  • 2407