Electron Enhanced Atomic Layer Deposition (EE-ALD) Conference Proceeding

Overview

CU Boulder Authors

George, Steven

publication date

April 22, 2019

Date in CU Experts

January 14, 2020 4:41 AM

Full Author List

George SM

author count

1

published in

International Symposium on VLSI Technology, Systems, and Applications, Proceedings Journal

presented at event

International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) Conference

Other Profiles

International Standard Serial Number (ISSN)

1930-8868