Volatile Etch Species Produced during Thermal Al2O3 Atomic Layer Etching Journal Article uri icon

Overview

publication date

  • January 9, 2020

Full Author List

  • Clancey JW; Cavanagh AS; Smith JET; Sharma S; George SM

Other Profiles

Additional Document Info

start page

  • 287

end page

  • 299

volume

  • 124

issue

  • 1