Volatile Etch Species Produced during Thermal Al2O3 Atomic Layer Etching Journal Article uri icon

Overview

publication date

  • January 9, 2020

has restriction

  • closed

Date in CU Experts

  • January 28, 2020 4:46 AM

Full Author List

  • Clancey JW; Cavanagh AS; Smith JET; Sharma S; George SM

author count

  • 5

citation count

  • 33

Other Profiles

International Standard Serial Number (ISSN)

  • 1932-7447

Electronic International Standard Serial Number (EISSN)

  • 1932-7455

Additional Document Info

start page

  • 287

end page

  • 299

volume

  • 124

issue

  • 1