Optimized reactive ion etch process for high performance SiC bipolar junction transistors Journal Article uri icon

Overview

publication date

  • July 1, 2007

Full Author List

  • Goulakov AB; Zhao F; Perez-Wurfl I; Torvik JT; Van Zeghbroeck B

Other Profiles

Additional Document Info

start page

  • 961

end page

  • 966

volume

  • 25

issue

  • 4