Ptychographic Complex Imaging Reflectometry for Spatially-Resolved Dopant Profiling Using a Tabletop EUV Source Conference Proceeding uri icon

Overview

publication date

  • August 1, 2019

Full Author List

  • Esashi Y; Porter CL; Tanksalvala M; Miley GP; Horiguchi N; Knobloch JL; Zhou J; Karl RM; Johnsen P; Bevis CS

Other Profiles

Additional Document Info

start page

  • 116

end page

  • 117

volume

  • 25

issue

  • S2