Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation) Conference Proceeding

Overview

CU Boulder Authors

publication date

February 24, 2019

has restriction

closed

Date in CU Experts

February 18, 2020 6:05 AM

Full Author List

Tanksalvala M; Porter CL; Esashi Y; Miley GP; Karl R; Johnsen P; Jenkins NW; Bevis CS; Wang B; Thurston J

Full Editor List

Adan O; Ukraintsev VA

author count

16

presented at event

Metrology, Inspection, and Process Control for Microlithography XXXIII Conference

Other Profiles

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2516827

Additional Document Info

start page

15

end page

15