Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation)
Conference Proceeding
Overview
publication date
- February 24, 2019
has restriction
- closed
Date in CU Experts
- February 18, 2020 6:05 AM
Full Author List
- Tanksalvala M; Porter CL; Esashi Y; Miley GP; Karl R; Johnsen P; Jenkins NW; Bevis CS; Wang B; Thurston J
author count
- 16