Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation) Conference Proceeding uri icon

Overview

publication date

  • February 24, 2019

Date in CU Experts

  • February 18, 2020 6:05 AM

Full Author List

  • Tanksalvala M; Porter CL; Esashi Y; Miley GP; Karl R; Johnsen P; Jenkins NW; Bevis CS; Wang B; Thurston J

author count

  • 16

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