Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation) Conference Proceeding uri icon

Overview

publication date

  • February 24, 2019

Full Author List

  • Tanksalvala M; Porter CL; Esashi Y; Miley GP; Karl R; Johnsen P; Jenkins NW; Bevis CS; Wang B; Thurston J

Other Profiles

International Standard Book Number (ISBN) 13

  • 9781510625655