Probing the Atomic-Scale Structure of Amorphous Aluminum Oxide Grown by Atomic Layer Deposition Journal Article uri icon


publication date

  • May 20, 2020

Full Author List

  • Young MJ; Bedford NM; Yanguas-Gil A; Letourneau S; Coile M; Mandia DJ; Aoun B; Cavanagh AS; George SM; Elam JW

Other Profiles

Additional Document Info

start page

  • 22804

end page

  • 22814


  • 12


  • 20