Packaging for microelectromechanical and nanoelectromechanical systems Journal Article uri icon

Overview

publication date

  • August 1, 2003

Full Author List

  • Lee YC; Parviz BA; Chiou JA; Chen SC

Other Profiles

Additional Document Info

start page

  • 217

end page

  • 226

volume

  • 26

issue

  • 3