Synthesis and tribological behavior of silicon oxycarbonitride thin films derived from poly(urea)methyl vinyl silazane
Journal Article
Overview
publication date
- January 1, 2006
Full Author List
- Cross TJ; Raj R; Cross TJ; Prasad SV; Tallant DR
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 113
end page
- 126
volume
- 3
issue
- 2