Mechanisms of Thermal Atomic Layer Etching Journal Article uri icon

Overview

publication date

  • June 16, 2020

Date in CU Experts

  • June 3, 2020 12:51 PM

Full Author List

  • George SM

author count

  • 1

citation count

  • 12

Other Profiles

International Standard Serial Number (ISSN)

  • 0001-4842

Electronic International Standard Serial Number (EISSN)

  • 1520-4898

Additional Document Info

start page

  • 1151

end page

  • 1160

volume

  • 53

issue

  • 6