Unique precursor delivery and control afforded by low-pressure pulsed-CVD process with ultrasonic atomization Journal Article uri icon

Overview

publication date

  • August 1, 2001

Full Author List

  • Krumdieck S; Sbaizero O; Raj R

Other Profiles

Additional Document Info

start page

  • 1161

end page

  • 1168

volume

  • 11

issue

  • PR3