Flip-chip fabrication of advanced micromirror arrays Journal Article

Overview

CU Boulder Authors

• Bright, Victor Mark

publication date

• January 1, 2002

Full Author List

• Michalicek MA; Bright VM

published in

• Sensors and Actuators A: Physical  Journal

Additional Document Info

start page

• 152

end page

• 167

volume

• 95

issue

• 2-3