Sensors and Actuators A: Physical Journal

Research

keywords

• 0906 Electrical and Electronic Engineering, 0912 Materials Engineering, 0913 Mechanical Engineering

Other

publication venue for

• A streamlined fabrication process for high energy density piezoelectric bending actuators 2021
• I-shaped thermally actuated VHF resonators with submicron components 2013
• Fabrication, assembly, and testing of a MEMS-enabled micro gas compressor for a 4:1 pressure ratio 2013
• Nanostructured silicon electrodes for solid-state 3-d rechargeable lithium batteries 2011
• ALD tungsten NEMS switches and tunneling devices 2011
• Tensile measurement of single crystal gallium nitride nanowires on MEMS test stages 2011
• Analysis of high-Q, gallium nitride nanowire resonators in response to deposited thin films 2011
• Atomic layer deposition enabled interconnect technology for vertical nanowire arrays 2011
• Multi-layer atom chips for atom tunneling experiments near the chip surface 2011
• Thermo-mechanical properties of alumina films created using the atomic layer deposition technique 2010
• Microsystem for nanofiber electromechanical measurements 2009
• Sacrificial layers for air gaps in NEMS using alucone molecular layer deposition 2009
• Micromachined resonators of high Q-factor based on atomic layer deposited alumina 2009
• Fabrication of tapered SU-8 structure and effect of sidewall angle for a variable focus microlens using EWOD 2007
• Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys 2007
• Influence of metal stress on RF MEMS capacitive switches 2007
• Process integration of carbon nanotubes into microelectromechanical systems 2006
• The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems 2006
• Fabrication of three-dimensional microstructures based on singled-layered SU-8 for lab-on-chip applications 2006
• Electromechanical and fluidic evaluation of the resonant microfan gas pump and aerosol collector 2005
• A methodology for analyzing the variability in the performance of a MEMS actuator made from a novel ceramic 2004
• Tether- and post-enabled flip-chip assembly for manufacturable RF-MEMS 2004
• A real time human-machine interface for an ultrahigh temperature MEMS sensor-igniter 2003
• A novel micro glow plug fabricated from polymer-derived ceramics: in situ measurement of high-temperature properties and application to ultrahigh-temperature ignition 2003
• A multi-component solder self-assembled micromirror 2003
• An integrated micro-optical system for VCSEL-to-fiber active alignment 2003
• Atomic layer deposited protective coatings for micro-electromechanical systems 2003
• Design and investigation of multi-level digitally positioned micromirror for open-loop controlled applications 2003
• Processing and characterization of silicon carbon-nitride ceramics: application of electrical properties towards MEMS thermal actuators 2003
• A low-temperature CVD process for silicon carbide MEMS 2002
• Application of microforging to SiCN MEMS fabrication 2002
• Development of the micro rotary fan 2002
• Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer? 2002
• Flip-chip fabrication of advanced micromirror arrays 2002
• MEMS-based series and shunt variable capacitors for microwave and millimeter-wave frequencies 2001
• Nanometer precision positioning robots utilizing optimized scratch drive actuators 2001
• Optical beam steering using MEMS-controllable microlens array 2001
• Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique 2001
• Micromachined, flip-chip assembled, actuatable contacts for use in high density interconnection in electronics packaging 2001
• Phase-only micromirror array fabricated by standard CMOS process 2001
• Prototype microrobots for micro-positioning and micro-unmanned vehicles 2000
• The realization and design considerations of a flip-chip integrated MEMS tunable capacitor 2000
• Solder self-assembly for three-dimensional microelectromechanical systems 1999
• Average power control and positioning of polysilicon thermal actuators 1999
• Multichip module packaging of microelectromechanical systems 1998
• Optical power induced damage to microelectromechanical mirrors 1998
• Automated assembly of flip-up micromirrors 1998
• Development of microelectromechanical variable blaze gratings 1998
• Polysilicon micromechanical gratings for optical modulation 1996
• Glass-blown spherical microcells for chip-scale atomic devices 2007