keywords 0906 Electrical and Electronic Engineering, 0912 Materials Engineering, 0913 Mechanical Engineering
publication venue for A streamlined fabrication process for high energy density piezoelectric bending actuators 2021 I-shaped thermally actuated VHF resonators with submicron components 2013 Fabrication, assembly, and testing of a MEMS-enabled micro gas compressor for a 4:1 pressure ratio 2013 Nanostructured silicon electrodes for solid-state 3-d rechargeable lithium batteries 2011 ALD tungsten NEMS switches and tunneling devices 2011 Tensile measurement of single crystal gallium nitride nanowires on MEMS test stages 2011 Analysis of high-Q, gallium nitride nanowire resonators in response to deposited thin films 2011 Atomic layer deposition enabled interconnect technology for vertical nanowire arrays 2011 Multi-layer atom chips for atom tunneling experiments near the chip surface 2011 Thermo-mechanical properties of alumina films created using the atomic layer deposition technique 2010 Microsystem for nanofiber electromechanical measurements 2009 Sacrificial layers for air gaps in NEMS using alucone molecular layer deposition 2009 Micromachined resonators of high Q-factor based on atomic layer deposited alumina 2009 Fabrication of tapered SU-8 structure and effect of sidewall angle for a variable focus microlens using EWOD 2007 Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys 2007 Influence of metal stress on RF MEMS capacitive switches 2007 Process integration of carbon nanotubes into microelectromechanical systems 2006 The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems 2006 Fabrication of three-dimensional microstructures based on singled-layered SU-8 for lab-on-chip applications 2006 Electromechanical and fluidic evaluation of the resonant microfan gas pump and aerosol collector 2005 A methodology for analyzing the variability in the performance of a MEMS actuator made from a novel ceramic 2004 Tether- and post-enabled flip-chip assembly for manufacturable RF-MEMS 2004 A real time human-machine interface for an ultrahigh temperature MEMS sensor-igniter 2003 A novel micro glow plug fabricated from polymer-derived ceramics: in situ measurement of high-temperature properties and application to ultrahigh-temperature ignition 2003 A multi-component solder self-assembled micromirror 2003 An integrated micro-optical system for VCSEL-to-fiber active alignment 2003 Atomic layer deposited protective coatings for micro-electromechanical systems 2003 Design and investigation of multi-level digitally positioned micromirror for open-loop controlled applications 2003 Processing and characterization of silicon carbon-nitride ceramics: application of electrical properties towards MEMS thermal actuators 2003 A low-temperature CVD process for silicon carbide MEMS 2002 Application of microforging to SiCN MEMS fabrication 2002 Development of the micro rotary fan 2002 Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer? 2002 Flip-chip fabrication of advanced micromirror arrays 2002 MEMS-based series and shunt variable capacitors for microwave and millimeter-wave frequencies 2001 Nanometer precision positioning robots utilizing optimized scratch drive actuators 2001 Optical beam steering using MEMS-controllable microlens array 2001 Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique 2001 Micromachined, flip-chip assembled, actuatable contacts for use in high density interconnection in electronics packaging 2001 Phase-only micromirror array fabricated by standard CMOS process 2001 Prototype microrobots for micro-positioning and micro-unmanned vehicles 2000 The realization and design considerations of a flip-chip integrated MEMS tunable capacitor 2000 Solder self-assembly for three-dimensional microelectromechanical systems 1999 Average power control and positioning of polysilicon thermal actuators 1999 Multichip module packaging of microelectromechanical systems 1998 Optical power induced damage to microelectromechanical mirrors 1998 Automated assembly of flip-up micromirrors 1998 Development of microelectromechanical variable blaze gratings 1998 Polysilicon micromechanical gratings for optical modulation 1996 Glass-blown spherical microcells for chip-scale atomic devices 2007