Fabrication of tapered SU-8 structure and effect of sidewall angle for a variable focus microlens using EWOD
Journal Article
Overview
publication date
- May 16, 2007
Full Author List
- Chang Y-J; Mohseni K; Bright VM
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 546
end page
- 553
volume
- 136
issue
- 2