I-shaped thermally actuated VHF resonators with submicron components
Journal Article
Overview
publication date
- June 1, 2013
Full Author List
- Hall HJ; Rahafrooz A; Brown JJ; Bright VM; Pourkamali S
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 160
end page
- 166
volume
- 195