I-shaped thermally actuated VHF resonators with submicron components Journal Article uri icon

Overview

publication date

  • June 1, 2013

Full Author List

  • Hall HJ; Rahafrooz A; Brown JJ; Bright VM; Pourkamali S

Other Profiles

Additional Document Info

start page

  • 160

end page

  • 166

volume

  • 195