I-shaped thermally actuated VHF resonators with submicron components Journal Article

Overview

CU Boulder Authors

• Bright, Victor Mark

publication date

• June 1, 2013

Full Author List

• Hall HJ; Rahafrooz A; Brown JJ; Bright VM; Pourkamali S

published in

• Sensors and Actuators A: Physical  Journal

Other Profiles

Digital Object Identifier (DOI)

• 10.1016/j.sna.2012.12.006

Additional Document Info

start page

• 160

end page

• 166

volume

• 195