Atomic-layer deposition for fabricating capacitive micromachined ultrasonic transducers: Initial characterization Journal Article uri icon

Overview

publication date

  • January 1, 2008

Full Author List

  • Liu L; Mukdadi OM; Tripp MK; Herrmann CF; Hertzberg JR; George SM; Bright VM; Shandas R

Additional Document Info

start page

  • 15

end page

  • 34

volume

  • 20

issue

  • 1