Average power control and positioning of polysilicon thermal actuators Journal Article

Overview

CU Boulder Authors

Bright, Victor Mark

publication date

January 8, 1999

Full Author List

Butler JT; Bright VM; Cowan WD

published in

Sensors and Actuators A: Physical Journal

Other Profiles

Digital Object Identifier (DOI)

10.1016/S0924-4247(98)00211-8

Additional Document Info

start page

88

end page

97

volume

72

issue

1