Thermo-mechanical evolution of multilayer thin films: Part I. Mechanical behavior of Au/Cr/Si microcantilevers Journal Article uri icon

Overview

publication date

  • February 12, 2007

Full Author List

  • Miller DC; Herrmann CF; Maier HJ; George SM; Stoldt CR; Gall K

Other Profiles

Additional Document Info

start page

  • 3208

end page

  • 3223

volume

  • 515

issue

  • 6