Thermo-mechanical evolution of multilayer thin films: Part I. Mechanical behavior of Au/Cr/Si microcantilevers
Journal Article
Overview
publication date
- February 12, 2007
Full Author List
- Miller DC; Herrmann CF; Maier HJ; George SM; Stoldt CR; Gall K
published in
- Thin Solid Films Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 3208
end page
- 3223
volume
- 515
issue
- 6