Intrinsic stress development and microstructure evolution of Au/Cr/Si multilayer thin films subject to annealing Journal Article uri icon

Overview

publication date

  • May 1, 2005

Full Author List

  • Miller DC; Herrmann CF; Maier HJ; George SM; Stoldt CR; Gall K

Other Profiles

Additional Document Info

start page

  • 873

end page

  • 879

volume

  • 52

issue

  • 9