Intrinsic stress development and microstructure evolution of Au/Cr/Si multilayer thin films subject to annealing Journal Article uri icon

Overview

publication date

  • May 1, 2005

Date in CU Experts

  • September 6, 2013 12:44 PM

Full Author List

  • Miller DC; Herrmann CF; Maier HJ; George SM; Stoldt CR; Gall K

author count

  • 6

citation count

  • 23

Other Profiles

International Standard Serial Number (ISSN)

  • 1359-6462

Additional Document Info

start page

  • 873

end page

  • 879

volume

  • 52

issue

  • 9