Full characterization of ultrathin 5-nm low-k dielectric bilayers: Influence of dopants and surfaces on the mechanical properties Journal Article uri icon

Overview

publication date

  • July 13, 2020

Full Author List

  • Frazer TD; Knobloch JL; Hernandez-Charpak JN; Hoogeboom-Pot KM; Nardi D; Yazdi S; Chao W; Anderson EH; Tripp MK; King SW

Other Profiles

Additional Document Info

volume

  • 4

issue

  • 7