publication date
- July 13, 2020
Full characterization of ultrathin 5-nm low-k dielectric bilayers: Influence of dopants and surfaces on the mechanical properties
Journal Article
Overview
has restriction
- green
Date in CU Experts
- July 29, 2020 1:32 AM
Full Author List
- Frazer TD; Knobloch JL; Hernandez-Charpak JN; Hoogeboom-Pot KM; Nardi D; Yazdi S; Chao W; Anderson EH; Tripp MK; King SW
author count
- 13
citation count
- 8
published in
- Physical Review Materials Journal
Other Profiles
International Standard Serial Number (ISSN)
- 2475-9953
Digital Object Identifier (DOI)
Additional Document Info
volume
- 4
issue
- 7
number
- ARTN 073603