Thermal Atomic Layer Etching of Gallium Oxide Using Sequential Exposures of HF and Various Metal Precursors Journal Article uri icon

Overview

publication date

  • July 28, 2020

has restriction

  • closed

Date in CU Experts

  • August 25, 2020 9:29 AM

Full Author List

  • Lee Y; Johnson NR; George SM

author count

  • 3

citation count

  • 22

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 5937

end page

  • 5948

volume

  • 32

issue

  • 14