Thermal Atomic Layer Etching of Gallium Oxide Using Sequential Exposures of HF and Various Metal Precursors Journal Article uri icon

Overview

publication date

  • July 28, 2020

Full Author List

  • Lee Y; Johnson NR; George SM

Other Profiles

Additional Document Info

start page

  • 5937

end page

  • 5948

volume

  • 32

issue

  • 14