HYPERTHERMAL NEUTRAL BEAM ETCHING Journal Article

Overview

CU Boulder Authors

• Minton, Timothy K.

publication date

• May 1, 1995

has restriction

• bronze

Date in CU Experts

• October 25, 2020 12:34 PM

Full Author List

• GIAPIS KP; MOORE TA; MINTON TK

author count

• 3

citation count

• 78

published in

• Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films   Journal

Other Profiles

International Standard Serial Number (ISSN)

• 0734-2101

Digital Object Identifier (DOI)

• https://doi.org/10.1116/1.579658

Additional Document Info

start page

• 959

end page

• 965

volume

• 13

issue

• 3