HYPERTHERMAL NEUTRAL BEAM ETCHING Journal Article uri icon

Overview

publication date

  • May 1, 1995

has restriction

  • green

Date in CU Experts

  • October 25, 2020 12:34 PM

Full Author List

  • GIAPIS KP; MOORE TA; MINTON TK

author count

  • 3

citation count

  • 78

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Additional Document Info

start page

  • 959

end page

  • 965

volume

  • 13

issue

  • 3