Microstructural comparisons of ultrathin Cu films deposited by ion-beam and dc-magnetron sputtering
Journal Article
Overview
publication date
- May 1, 2005
Full Author List
- Prater WL; Allen EL; Lee WY; Toney MF; Kellock A; Daniels JS; Hedstrom JA; Harrell T
published in
- Journal of Applied Physics Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
volume
- 97
issue
- 9