Microstructural comparisons of ultrathin Cu films deposited by ion-beam and dc-magnetron sputtering Journal Article uri icon

Overview

publication date

  • May 1, 2005

Full Author List

  • Prater WL; Allen EL; Lee WY; Toney MF; Kellock A; Daniels JS; Hedstrom JA; Harrell T

Other Profiles

Additional Document Info

volume

  • 97

issue

  • 9