Reduction of resistivity in Cu thin films by partial oxidation: Microstructural mechanisms Journal Article uri icon

Overview

publication date

  • April 5, 2004

Full Author List

  • Prater WL; Allen EL; Lee WY; Toney MF; Daniels J; Hedstrom JA

Other Profiles

Additional Document Info

start page

  • 2518

end page

  • 2520

volume

  • 84

issue

  • 14