Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: A comparative study Journal Article uri icon

Overview

publication date

  • September 1, 2003

Full Author List

  • Grill A; Patel V; Rodbell KP; Huang E; Baklanov MR; Mogilnikov KP; Toney M; Kim HC

Other Profiles

Additional Document Info

start page

  • 3427

end page

  • 3435

volume

  • 94

issue

  • 5