Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: A comparative study Journal Article uri icon

Overview

publication date

  • September 1, 2003

has restriction

  • closed

Date in CU Experts

  • November 5, 2020 2:39 AM

Full Author List

  • Grill A; Patel V; Rodbell KP; Huang E; Baklanov MR; Mogilnikov KP; Toney M; Kim HC

author count

  • 8

citation count

  • 93

Other Profiles

International Standard Serial Number (ISSN)

  • 0021-8979

Additional Document Info

start page

  • 3427

end page

  • 3435

volume

  • 94

issue

  • 5