Understanding stress gradients in microelectronic metallization Conference Proceeding uri icon

Overview

publication date

  • August 1, 2011

has restriction

  • closed

Date in CU Experts

  • November 5, 2020 2:39 AM

Full Author List

  • Murray CE; Ryan ET; Besser PR; Witt C; Jordan-Sweet JL; Toney MF

author count

  • 6

citation count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 0885-7156

Electronic International Standard Serial Number (EISSN)

  • 1945-7413

Additional Document Info

start page

  • 92

end page

  • 98

volume

  • 27

issue

  • 2