Understanding stress gradients in microelectronic metallization Conference Proceeding
Overview
publication date
- August 1, 2011
has restriction
- closed
Date in CU Experts
- November 5, 2020 2:39 AM
Full Author List
- Murray CE; Ryan ET; Besser PR; Witt C; Jordan-Sweet JL; Toney MF
author count
- 6
citation count
- 3
published in
presented at event
- 60th Denver X-ray Conference (DXC) Conference
Other Profiles
International Standard Serial Number (ISSN)
- 0885-7156
Electronic International Standard Serial Number (EISSN)
- 1945-7413
Digital Object Identifier (DOI)
Additional Document Info
start page
- 92
end page
- 98
volume
- 27
issue
- 2