Phase, grain structure, stress, and resistivity of sputter-deposited tungsten films Journal Article uri icon

Overview

publication date

  • September 1, 2011

has restriction

  • closed

Date in CU Experts

  • November 5, 2020 2:39 AM

Full Author List

  • Choi D; Wang B; Chung S; Liu X; Darbal A; Wise A; Nuhfer NT; Barmak K; Warren AP; Coffey KR

author count

  • 11

citation count

  • 110

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 29

issue

  • 5

number

  • ARTN 051512