Phase, grain structure, stress, and resistivity of sputter-deposited tungsten films Journal Article uri icon

Overview

publication date

  • September 1, 2011

Full Author List

  • Choi D; Wang B; Chung S; Liu X; Darbal A; Wise A; Nuhfer NT; Barmak K; Warren AP; Coffey KR

Other Profiles

Additional Document Info

volume

  • 29

issue

  • 5