Phase, grain structure, stress, and resistivity of sputter-deposited tungsten films Journal Article

Overview

CU Boulder Authors

Toney, Michael Folsom

publication date

September 1, 2011

Full Author List

Choi D; Wang B; Chung S; Liu X; Darbal A; Wise A; Nuhfer NT; Barmak K; Warren AP; Coffey KR

published in

Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films Journal

Other Profiles

Digital Object Identifier (DOI)

10.1116/1.3622619

Additional Document Info

volume

29

issue

5