Phase, grain structure, stress, and resistivity of sputter-deposited tungsten films
Journal Article
Overview
publication date
- September 1, 2011
Full Author List
- Choi D; Wang B; Chung S; Liu X; Darbal A; Wise A; Nuhfer NT; Barmak K; Warren AP; Coffey KR
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
volume
- 29
issue
- 5