Evolution of stress gradients in Cu films and features induced by capping layers
Journal Article
Overview
publication date
- April 1, 2012
Full Author List
- Murray CE; Ryan ET; Besser PR; Witt C; Jordan-Sweet JL; Toney MF
published in
- Microelectronic Engineering Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 95
end page
- 100
volume
- 92