Evolution of stress gradients in Cu films and features induced by capping layers Journal Article uri icon

Overview

publication date

  • April 1, 2012

Full Author List

  • Murray CE; Ryan ET; Besser PR; Witt C; Jordan-Sweet JL; Toney MF

Other Profiles

Additional Document Info

start page

  • 95

end page

  • 100

volume

  • 92