Evolution of stress gradients in Cu films and features induced by capping layers Journal Article uri icon

Overview

publication date

  • April 1, 2012

Date in CU Experts

  • November 5, 2020 2:39 AM

Full Author List

  • Murray CE; Ryan ET; Besser PR; Witt C; Jordan-Sweet JL; Toney MF

author count

  • 6

Other Profiles

International Standard Serial Number (ISSN)

  • 0167-9317

Electronic International Standard Serial Number (EISSN)

  • 1873-5568

Additional Document Info

start page

  • 95

end page

  • 100

volume

  • 92