Evolution of stress gradients in Cu films and features induced by capping layers Journal Article

Overview

CU Boulder Authors

Toney, Michael Folsom

publication date

April 1, 2012

Full Author List

Murray CE; Ryan ET; Besser PR; Witt C; Jordan-Sweet JL; Toney MF

published in

Microelectronic Engineering Journal

Other Profiles

Digital Object Identifier (DOI)

10.1016/j.mee.2010.11.043

Additional Document Info

start page

95

end page

100

volume

92