Applications of synchrotron X-rays in microelectronics industry research Conference Proceeding uri icon

Overview

publication date

  • October 10, 2004

Full Author List

  • Jordan-Sweet JL; Detavernier C; Lavoie C; Mooney PM; Toney MF

Other Profiles

Additional Document Info

start page

  • 247

end page

  • 252

volume

  • 241

issue

  • 1-4