Microstructure and properties of ultrathin amorphous silicon nitride protective coating Journal Article uri icon

Overview

publication date

  • November 1, 2003

Full Author List

  • Yen BK; White RL; Waltman RJ; Dai Q; Miller DC; Kellock AJ; Marchon B; Kasai PH; Toney MF; York BR

Other Profiles

Additional Document Info

start page

  • 1895

end page

  • 1904

volume

  • 21

issue

  • 6