Coherent Fourier scatterometry using orbital angular momentum beams for defect detection Journal Article uri icon

Overview

publication date

  • February 1, 2021

Full Author List

  • Wang B; Tanksalvala M; Zhang Z; Esashi Y; Jenkins NW; Murnane MM; Kapteyn HC; Liao C-T

Other Profiles

Additional Document Info

start page

  • 3342

end page

  • 3358

volume

  • 29

issue

  • 3