Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry Journal Article uri icon

Overview

publication date

  • January 1, 2021

Full Author List

  • Tanksalvala M; Porter CL; Esashi Y; Wang B; Jenkins NW; Zhang Z; Miley GP; Knobloch JL; McBennett B; Horiguchi N

Other Profiles

Additional Document Info

volume

  • 7

issue

  • 5