Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry
Journal Article
Overview
publication date
Date in CU Experts
Full Author List
-
Tanksalvala M; Porter CL; Esashi Y; Wang B; Jenkins NW; Zhang Z; Miley GP; Knobloch JL; McBennett B; Horiguchi N
author count
citation count
published in
Other Profiles
International Standard Serial Number (ISSN)
Digital Object Identifier (DOI)
Additional Document Info
volume
issue
number