Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry Journal Article

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Overview

CU Boulder Authors

publication date

January 1, 2021

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Date in CU Experts

February 3, 2021 3:19 AM

Full Author List

Tanksalvala M; Porter CL; Esashi Y; Wang B; Jenkins NW; Zhang Z; Miley GP; Knobloch JL; McBennett B; Horiguchi N

author count

25

citation count

17

published in

Science Advances Journal

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International Standard Serial Number (ISSN)

2375-2548

Digital Object Identifier (DOI)

https://doi.org/10.1126/sciadv.abd9667

Additional Document Info

volume

7

issue

5

number

ARTN eabd9667