Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry Journal Article uri icon

Overview

publication date

  • January 1, 2021

Date in CU Experts

  • February 3, 2021 3:19 AM

Full Author List

  • Tanksalvala M; Porter CL; Esashi Y; Wang B; Jenkins NW; Zhang Z; Miley GP; Knobloch JL; McBennett B; Horiguchi N

author count

  • 25

citation count

  • 3

Other Profiles

International Standard Serial Number (ISSN)

  • 2375-2548

Additional Document Info

volume

  • 7

issue

  • 5

number

  • ARTN eabd9667