Ptychographic Phase-Sensitive Imaging Reflectometry for Depth-Resolved Nanostructure Characterization using Tabletop EUV Light Conference Proceeding uri icon



  • We present a versatile, ptychographic phase-sensitive imaging EUV reflectometer that can nondestructively image samples with spatial, depth and compositional resolution, with sensitivities to dopant levels and interface quality.

publication date

  • January 1, 2020

has restriction

  • closed

Date in CU Experts

  • February 3, 2021 3:31 AM

Full Author List

  • Jenkins NW; Tanksalvala M; Esashi Y; Porter CL; Wang B; Horiguchi N; Jacobs MN; Gerrity M; Kapteyn HC; Murnane MM

author count

  • 10

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