Ptychographic Phase-Sensitive Imaging Reflectometry for Depth-Resolved Nanostructure Characterization using Tabletop EUV Light Conference Proceeding uri icon

Overview

publication date

  • January 1, 2020

Full Author List

  • Jenkins NW; Tanksalvala M; Esashi Y; Porter CL; Wang B; Horiguchi N; Jacobs MN; Gerrity M; Kapteyn HC; Murnane MM

Other Profiles

International Standard Book Number (ISBN) 13

  • 9781943580736