A Laboratory Light Source for Ultrafast Kinetics of EUV Exposure Processes and Ultra-Small Pitch Lithography
Conference Proceeding
Overview
publication date
- May 10, 2020
Date in CU Experts
- February 3, 2021 4:38 AM
Full Author List
- Cousin SL; Bargsten C; Rinard E; Ward R; Hosler E; Petersen B; Kapteyn H; Vanelderen P; Petersen J; van der Heide P
author count
- 10
presented at event
Other Profiles
International Standard Serial Number (ISSN)
- 2160-9020