A Laboratory Light Source for Ultrafast Kinetics of EUV Exposure Processes and Ultra-Small Pitch Lithography Conference Proceeding uri icon


publication date

  • May 10, 2020

Date in CU Experts

  • February 3, 2021 4:38 AM

Full Author List

  • Cousin SL; Bargsten C; Rinard E; Ward R; Hosler E; Petersen B; Kapteyn H; Vanelderen P; Petersen J; van der Heide P

author count

  • 10

Other Profiles

International Standard Serial Number (ISSN)

  • 2160-9020