Alucone Interlayers to Minimize Stress Caused by Thermal Expansion Mismatch between Al2O3 Films and Teflon Substrates Journal Article uri icon

Overview

publication date

  • February 13, 2013

Full Author List

  • Jen S-H; George SM

Other Profiles

Additional Document Info

start page

  • 1165

end page

  • 1173

volume

  • 5

issue

  • 3