Molecular Layer Deposition of Aluminum Alkoxide Polymer Films Using Trimethylaluminum and Glycidol
Journal Article
Overview
publication date
- December 20, 2011
Full Author List
- Lee Y; Yoon B; Cavanagh AS; George SM
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 15155
end page
- 15164
volume
- 27
issue
- 24