Importance of Trimethylaluminum Diffusion in Three-Step ABC Molecular Layer Deposition Using Trimethylaluminum, Ethanolamine, and Maleic Anhydride
Journal Article
Overview
publication date
- December 21, 2010
Full Author List
- Seghete D; Hall RA; Yoon B; George SM
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 19045
end page
- 19051
volume
- 26
issue
- 24