Importance of Trimethylaluminum Diffusion in Three-Step ABC Molecular Layer Deposition Using Trimethylaluminum, Ethanolamine, and Maleic Anhydride Journal Article uri icon

Overview

publication date

  • December 21, 2010

Full Author List

  • Seghete D; Hall RA; Yoon B; George SM

Other Profiles

Additional Document Info

start page

  • 19045

end page

  • 19051

volume

  • 26

issue

  • 24