Atomic Layer Deposition: An Overview Journal Article uri icon

Overview

publication date

  • January 1, 2010

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • George SM

author count

  • 1

citation count

  • 3838

Other Profiles

International Standard Serial Number (ISSN)

  • 0009-2665

Electronic International Standard Serial Number (EISSN)

  • 1520-6890

Additional Document Info

start page

  • 111

end page

  • 131

volume

  • 110

issue

  • 1