Atomic-layer deposition of wear-resistant coatings for microelectromechanical devices Journal Article uri icon

Overview

publication date

  • April 28, 2003

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • Mayer TM; Elam JW; George SM; Kotula PG; Goeke RS

author count

  • 5

citation count

  • 156

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Electronic International Standard Serial Number (EISSN)

  • 1077-3118

Additional Document Info

start page

  • 2883

end page

  • 2885

volume

  • 82

issue

  • 17