Atomic-layer deposition of wear-resistant coatings for microelectromechanical devices Journal Article uri icon

Overview

publication date

  • April 28, 2003

Full Author List

  • Mayer TM; Elam JW; George SM; Kotula PG; Goeke RS

Other Profiles

Additional Document Info

start page

  • 2883

end page

  • 2885

volume

  • 82

issue

  • 17