Nucleation period, surface roughness, and oscillations in mass gain per cycle during W atomic layer deposition on Al2O3 Journal Article uri icon

Overview

publication date

  • April 1, 2009

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • Wind RW; Fabreguette FH; Sechrist ZA; George SM

author count

  • 4

citation count

  • 54

Other Profiles

International Standard Serial Number (ISSN)

  • 0021-8979

Electronic International Standard Serial Number (EISSN)

  • 1089-7550

Additional Document Info

volume

  • 105

issue

  • 7

number

  • ARTN 074309