Conformal coating on ultrahigh-aspect-ratio nanopores of anodic alumina by atomic layer deposition Journal Article uri icon

Overview

publication date

  • September 9, 2003

Full Author List

  • Elam JW; Routkevitch D; Mardilovich PP; George SM

Other Profiles

Additional Document Info

start page

  • 3507

end page

  • 3517

volume

  • 15

issue

  • 18