X-ray reflectivity characterization of ZnO/Al2O3 multilayers prepared by atomic layer deposition Journal Article uri icon

Overview

publication date

  • May 1, 2002

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • Jensen JM; Oelkers AB; Toivola R; Johnson DC; Elam JW; George SM

author count

  • 6

citation count

  • 80

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Additional Document Info

start page

  • 2276

end page

  • 2282

volume

  • 14

issue

  • 5