X-ray reflectivity characterization of ZnO/Al2O3 multilayers prepared by atomic layer deposition Journal Article uri icon

Overview

publication date

  • May 1, 2002

Full Author List

  • Jensen JM; Oelkers AB; Toivola R; Johnson DC; Elam JW; George SM

Other Profiles

Additional Document Info

start page

  • 2276

end page

  • 2282

volume

  • 14

issue

  • 5