Quartz crystal microbalance study of tungsten atomic layer deposition using WF6 and Si2H6 Journal Article uri icon

Overview

publication date

  • September 22, 2005

Full Author List

  • Fabreguette FH; Sechrist ZA; Elam JW; George SM

Other Profiles

Additional Document Info

start page

  • 103

end page

  • 110

volume

  • 488

issue

  • 1-2