Quartz crystal microbalance study of tungsten atomic layer deposition using WF6 and Si2H6 Journal Article uri icon

Overview

publication date

  • September 22, 2005

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • Fabreguette FH; Sechrist ZA; Elam JW; George SM

author count

  • 4

citation count

  • 51

Other Profiles

International Standard Serial Number (ISSN)

  • 0040-6090

Additional Document Info

start page

  • 103

end page

  • 110

volume

  • 488

issue

  • 1-2