Low-temperature Al₂O₃ atomic layer deposition Journal Article

Overview

CU Boulder Authors

• George, Steven

publication date

• February 24, 2004

has restriction

• closed

Date in CU Experts

• September 6, 2013 4:38 AM

Full Author List

• Groner MD; Fabreguette FH; Elam JW; George SM

author count

• 4

citation count

• 1173

published in

• Chemistry of Materials  Journal

Other Profiles

International Standard Serial Number (ISSN)

• 0897-4756

Electronic International Standard Serial Number (EISSN)

• 1520-5002

Digital Object Identifier (DOI)

• https://doi.org/10.1021/cm0304546

Additional Document Info

start page

• 639

end page

• 645

volume

• 16

issue

• 4