ATOMIC LAYER GROWTH OF SIO2 ON SI(100) USING SICL4 AND H2O IN A BINARY REACTION SEQUENCE Journal Article uri icon

Overview

publication date

  • July 10, 1995

Full Author List

  • SNEH O; WISE ML; OTT AW; OKADA LA; GEORGE SM

Other Profiles

Additional Document Info

start page

  • 135

end page

  • 152

volume

  • 334

issue

  • 1-3